Renewable Energy Systems has enormous potential to meet most of the world's energy demands. Precisely, RES-based hybrid power plants seem to be a promising option towards elimination of environmental impact of production and consumption of electricity. A multi-criteria methodology for identifying the most appropriate location(s) for installing low-scale RES-based hybrid electricity production systems to cover local energy demands without grid connection is presented here. The selection is initially based on geographical, spatial and demographical data, while also taken into account are optimally combined meteorological data (solar and wind potential), with available resources (in terms of free space, land use and investment costs). In order to assure high possibility of full load coverage by RES, we have chosen settlements presenting low electricity demands, located at areas of high and low solar and wind potential and maintain low population range (50 - 100 residents). The selected settlements are Repetista and Areti, villages at Kalpaki, Ioannina, Epirus, Hagia Sophia and Fisini, villages at Lemnos Island, North Aegean Sea, Kumasa and Kandyllas, villages at Vagonia, Heraklion, Crete and Kato Lefkos and Lefkos, Karpathos Island, Dodecanese, South Aegean Sea. The desired loads are crucial for the optimal operation of the off-grid power production systems. On top of that, optimization in not only the size and the operation of the hybrid system, but also in the composition of energy sources mixture, is also performed. Findings show that it is feasible to implement autonomous power generation and electricity coverage from renewable energy systems for small settlements, based on the presented multi-criteria methodology. Finally, the social acceptance for such an installation is presented after using and elaborating a relative questionnaire that was answered by the residents of two settlements.